metrology

Aerotech has launched a motion control sensor with a parallel-kinematic design which provides unmatched geometric performance, says company, adding that it also offers superior positioning resolution and linearity with the direct-metrology capacitive sensor.

Aerotech’s QNP3 series XYZ piezo positioning stages combine sub-nanometer resolution, high dynamics, and excellent geometric performance in a compact three-degree-of-freedom (DoF) package.

They come with a 40 mm x 40 mm clear aperture with closed-loop travels up to 100 µm x 100 µm x 10 µm (open-loop travels to 120 µm x 120 µm x 12 µm).

The design is ideal for optical and scanning probe microscopy or other inspection or manufacturing applications where two-sided part access is required with three-DoF manipulation.  [Read more…] about Aerotech demonstrates patent-pending motion control sensor