Alio Industries says its patented Hybrid Hexapod was developed by Alio to address the critical weaknesses of conventional legacy hexapod designs, as well as the weaknesses of stacked serial stages, and to achieve nanometer-level accuracy, repeatability, and high-integrity flatness and straightness during motion.
It utilizes a tripod parallel kinematics structure to deliver Z plane and tip/tilt motion, integrated with a monolithic serial kinematic structure for XY motion.
A rotary stage integrated into the top of the tripod (or underneath it, depending on application needs) provides 360-degree continuous Theta Z rotation. [Read more…] about Alio says its Hybrid Hexapod addresses ‘critical weaknesses’ of traditional motion systems
